Model 410

UV Light Meter

Applications include:

UV Sterilization, Area Exposures, Photolithography, Scanners, Steppers

Light Meter Features

  • Less than 1% Probe to Probe Repeatability.
  • Real Time Measurements.
  • Interchangeable Probes
  • Calibrated to NIST Standards
  • Calibration Accuracy to 3 Sigma
  • Cosine Response Probes
  • Measures MW/CM2 , MJ/CM2 , accumulated MJ/CM2 , time (MS), and accumulated time.
  • Calculates average value, % uniformity, % deviation from center value, and more.
  • Backlit display makes reading easy in any light.
  • Battery operates for approximately 18 hours before recharge.

A Diverse Light Measurement Instrument

The Model 410 is a measurement instrument with diverse capabilities. A built in computer allows the Model 410 to store sensor readings and calculate average values, percent deviations and other data values. This capability saves you from writing down values and doing calculations to get source uniformity or exposure consistency.  Also, the Model 410 computer interface allows stored data to be transfer to permanent storage.  The large display format (4×20 characters) gives space for many readings to be viewed at one time.

To make measurements less complicated, the Model 410 is programmed for a variety of operation modes. This allows for a selection of a mode which best suits the data you want to take. The Model 410 will be programmed for the mode sets that best suit the measurements needed.

This means, if you are doing large area uniformity measurements, you will have average value, percent uniformity, and deviation from center value, but you will not have standard deviation of calculations of four sets of millijoule exposures.

The simple format allows you to select the mode that gives you the results you want and then lets the machine do the work. Data review is simple with single button prompts to move back and forward through data results.

UV Light Meter Accessories

A variety of sensor packages are available to use with the Model 410 to measure exposure tools as follows: Nikon, Ultratek, Perkin Elmer, Karl Suss, ABM, OAI, and more. Probe wavelengths are available from 173nm through 540nm into the infrared spectrum.

A rechargeable battery makes the unit very portable. The battery will operate for approximately 18 hours before recharge is needed. Recharge overnight (actual time is 6 hours). You can recharge and operate at the same time, but charging will take much longer. The charger will operate from 90-240 VAC, 47 to 63 Hz and has UL, CE, and TUV approvals.

Light Meter Model 410 Specifications – Area Exposure Machines

Switch Functions:
  • Red button – ON (hold for one second)
  • Gain Switch – 1X or 10X
  • Three Black buttons – Functions (display assigned) ‘RST’ (reset), ‘STO’ (store), ‘More’, Disregard, ‘Mode’, ‘Off’, etc.
Display:
  • 4 Lines by 20 characters with back light
Range:
  • MW/CM2
    • x1 Scale – .01 to 249.9
    • x10 Scale – .1 to 2,499.9
  • MJ/CM2
    • x1 Scale – .01 to 9,999,999
    • x10 Scale – .1 to 9,999,999
  • Milliseconds .1 to 9,999.999
Mode Selection: Mode 1:
  • MW/CM2 and peak Mw/CM2 continuous display
Mode 2:
  • Multiple reading of Mw/CM2 for uniformity measurement
  • Push button STO (store) of reading-nine readings in set pattern
  • Display of average MJ/CM2 and +/-% uniformity
  • Display of + or -% deviation from center reading
Mode 3:
  • Single reading and accumulated MJ/CM2, and time with peak Mw/CM2
  • Shutter control or scanning beam (Perkin Elmer)
Mode 4:
    • Multiple readings of MJ/CM2, time, and peak Mw/CM2
    • Shutter control of readings – nine reading in a set pattern
    • Display of average MJ/CM2 and +/-% deviation from center reading.

 

 

Mode 6:
  • Multiple readings of Mw/CM2 and peak Mw/CM2 using shutter control of the measurement (one second) to measure source uniformity – line pattern – (circular pattern available)
  • Display of average intensity Mw/CM2 and the +/-% uniformity
  • Display of + or – % deviation from center readings
  • Display of all nine readings
  • Display of max and min readings
Power:
  • Built in rechargeable battery – 18 hours operation (approx.)
  • Recharge time 6 hours (unit off) – indicated by LED (goes dim and then off when fully charged)
  • Low battery indication on display next to ‘RST’
  • Charger – 90-240 VAC, 47-63 Hz
  • Charger is UL, CE, TUV approved
Probe Wavelengths: <220nm to 540nm and more>
Size: 5 3/4 L (146mm) x 8 1/4 (210mm) x 2 H (51mm) Weight

Mode 2 and Mode 4 have an additional capability to measure five (5) points as well as nine (9) points. The pattern used for five points is #1 center, #2 straight up (12 o’clock), and #3 left of center (9 o’clock), and #4 straight down (6 o’clock) and #5 right of center (3 o’clock). When the fifth reading is taken then the word ‘CALC’ shows up on the display. Press the ‘CALC’ button and the ‘More’ button and the % deviation of each reading from reading #1 will be displayed. In reading nine points, ignore the ‘CALC’ selection.

Note #1: When the battery symbol comes on next to the ‘RST’ (reset) on the display, then plug in the charger to continue operating the Model 410. The time left on the battery is 30 minutes maximum.

Note #2: The circular counter clockwise pattern is #1 center with #2 position straight up at 12 o’clock with number rotation counter clockwise at 45 degree increments 3 through 9. The linear pattern is #1 center position, #2 upper left, #3 upper center, #4 upper right, #5 left center, center, #6 right center, #7 lower left, #8 lower center and #9 lower right.

Note #3: Uniformity is calculated using the following formula:

Max reading – Min reading x 100 = +/-%

Max reading + Min reading


G&R Labs Sensor Spectral Ranges

This graph accurately represents the spectral response of probes used today in the Microelectronic Industry. This graph includes the spectral response of the detector as well as the spectral response of the filter glass used in probes.

Model 410 Specifications – Nikon Modes

Switch Functions:
  • Red button – ON (hold for one second)
  • Gain Switch
  • Three Black buttons – Functions (display assigned) ‘RST’ (reset), ‘STO’ (store), ‘More’, Disregard, ‘Mode’, ‘Off’, etc.
Display:
  • 4 Lines by 20 characters with back light
Range:
  • Mw/CM2
    • x1 Scale – .01 to 249.9
    • 10 Scale – .1 to 2,499.9
  • MJ/CM2
    • x1 Scale – .01 to 9,999,999
    • x10 Scale – .1 to 9,999,999
  • Milliseconds .1 to 9,999,999
Mode Selection: Mode 1:
  • Mw/CM2 and peak Mw/CM2 continuous display
Mode 3:
  • Single reading and accumulated MJ/CM2, and time with peak Mw/CM2
  • Shutter control or scanning beam (Perkin Elmer)
Mode 5:(Nikon)
  • Multiple reading of MJ/CM2and time to determine consistency of a system exposure using shutter control
  • Display of average MJ/CM2 range and standard deviation (3 Sigmas)
  • Display of 10 readings of MJ/CM2
Mode 7:(Nikon)
  • Reading of MJ/CM2 in four sets. Any number of shutter openings from 2 to 10 per set with set target values of 400 MJ/CM2 (set 1), 200 MJ/CM2 (set 2), 100 MJ/CM2 (set 3), and 50 MJ/CM2 (set 4), record all shutter opening values and display for each set the average value, standard deviation 3 sigma, range (max-min), values of MJ/CM2 and the % deviation from the target value of each reading
Mode 8:(Nikon)
  • Reads MW/CM2 and peak MW/CM2 for nine shutter openings of one second (minimum). Displays the average value, the individual % deviation of each reading from average value, all nine readings, and the maximum and minimum readings
Power:
  • Built in rechargeable battery – 18 hours operation (approx.)
  • Recharge time 6 hours (unit off) – indicated by LED (goes dim and then off when fully charged)
  • Low battery indication on display next to ‘RST’
  • Charger – 90-240 VAC, 47-63 Hz
  • Charger is UL, CE, TUV approved
Probe Wavelengths: <220nm to 540nm and more>
Size:
  • 5 3/4 L (146mm) x 8 1/4 (210mm) x 2 H (51mm) Weight
  • Steel Metal casing

Request a Quote >>