Features
- Less than 1% Probe to Probe Repeatability.
- Real Time Measurements.
- Interchangeable Probes
- Dual channel probe capability(Model 322)
- Cosine response probes
- Measures MW/CM2, peak MW/CM2, MJ/CM2(SP), accumulated MJ/CM2 time (seconds), and accumulated time
- Calculates average value, % uniformity and % deviation from center value
- Battery operates for approximately 18 hours before recharge
- Charger operates from 100-240 VAC, 50-60 Hz with UL, CE, and TUV approvals
The Model 320 is a simplification of the Model 400. As in the 400, a built-in computer allows storing of sensor readings and calculations of average value and percent deviations. The two line display format allows for several readings at one time. The Model 320 measures MW/CM2, peak MW/CM2, MJ/CM2 (single pulse), accumulated MJ/CM2, time (single pulse), and accumulated seconds.
The Model 320 has four modes of operation. 5 point MW and 5 point MJ allow taking five readings in a fixed pattern and then displaying the average value and the +/-% uniformity as well as the +/-% deviation from the center value.
The rechargeable battery lasts for about 18 hours and the charger operates from 100-240 VAC, 50-60 Hz with UL, CE, and TUV approvals.
A variety of sensor packages can be used with the Model 320 at wavelengths from 220nm to 540nm and beyond. Traceability to NIST is +/-3.0% with probe matching to +/-1.0%. The Model 320 can be set up to work with a dual channel probe.
Model 320/322 Specifications – Area Exposure Machines |
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| Display: |
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| Range: |
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| Mode Selection: | MW/CM2 |
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| MJ/CM2-Time |
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| 5 Point MW |
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| 5 Point MJ |
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| Display Pattern: | ![]() |
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| Power: |
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This graph accurately represents the spectral response of probes used today in the Microelectronic Industry. This graph includes the spectral response of the detector as well as the spectral response of the filter glass used in probes.

