G & R Labs - Model 400

Model 400 Data Sheet

The Model 400

The Model 400 is a measurement instrument with diverse capabilities. A built in computer allows the Model 400 to store sensor readings and calculate average values, percent deviations and other data values. The large display format (4x20 characters) gives space for many readings to be viewed at one time. This capability saves you from writing down values and doing calculations to get source uniformity or exposure consistency.

To make measurements less complicated, the Model 400 is programmed for a variety of operation modes. This allows for a selection of a mode which best suits the data you want to take. The Model 400 will be programmed for the mode sets that best suit the measurements needed.

This means, if you are doing large area uniformity measurements, you will have average value, percent uniformity, and deviation from center value, but you will not have standard deviation of calculations of four sets of millijoule exposures.

The simple format allows you to select the mode that gives you the results you want and then lets the machine do the work. Data review is simple with single button prompts to move back and forward through data results.

A variety of sensor packages are available to use with the Model 400 to measure exposure tools as follows: Nikon, Ultratek, Perkin Elmer, Karl Suss, ABM, OAI, and more. Probe wavelengths are available from 173nm through 540nm into the infrared spectrum.

A rechargeable battery makes the unit very portable. The battery will operate for approximately 18 hours before recharge is needed. Recharge overnight (actual time is 6 hours). You can recharge and operate at the same time, but charging will take much longer. The charger will operate from 90-240 VAC, 47 to 63 Hz and has UL, CE, and TUV approvals.

Model 400 features

Less than 1% Probe to Probe Repeatability.
Real Time Measurements.
Interchangeable Probes
Improved NIST Calibrations Specifications
Calibration Accuracy to 3 Sigma
Probes for all Stepper Types Work with Single Electronics
Cosine Response Probes
Measures MW/CM², MJ/CM², accumulated MJ/CM², time (MS), and accumulated time.
Calculates average value, % uniformity, % deviation from center value, and more.
Backlit display makes reading easy in any light.
Battery operates for approximately 18 hours before recharge.
Calculates 3 Sigma deviation for multiple readings at shutter openings.
Charger operates from 90-240 VAC, 47-63 Hz with UL, CE, and TUV approvals.

This graph accurately represents the spectral response of probes used today in the Microelectronic Industry. This graph includes the spectral response of the detector as well as the spectral response of the filter glass used in probes.

Model 400 Specifications - Area Exposure Machines

Switch Functions:

Red button - ON (hold for one second)
Three Black buttons - Functions (display assigned)
'RST' (reset), 'STO' (store), 'More', Disregard, 'Mode', 'Off', Etc.

Display:

4 Lines by 20 characters with back light

Range:

Mw/CM² .1 to 2300.0 (peak same)
MJ/CM² .1 to 9999.9
Milliseconds .1 to 9999.9

Mode Selection:

Mode 1:

Mw/CM² and peak Mw/CM² continuous display

Mode 2:

Multiple reading of Mw/CM² for uniformity measurement
Push button STO (store) of reading-nine readings in set pattern
Display of average MJ/CM² and +/-% uniformity
Display of + or -% deviation from center reading

Mode 3:

Single reading and accumulated MJ/CM², and time with peak Mw/CM²
Shutter control or scanning beam (Perkin Elmer)

Mode 4:

Multiple readings of MJ/CM², time, and peak Mw/CM²
Shutter control of readings - nine reading in a set pattern
Display of average MJ/CM² and +/-% deviation from center reading

Mode 6:

Multiple readings of Mw/CM² and peak Mw/CM² using shutter control of the measurement (one second) to measure source uniformity - line pattern - (circular pattern available)
Display of average intensity Mw/CM² and the +/-% uniformity
Display of + or - % deviation from center readings
Display of all nine readings
Display of max and min readings

Power:

Built in rechargeable battery - 18 hours operation (approx.)
Recharge time 6 hours (unit off) - indicated by LED (goes dim and then off when fully charged)
Low battery indication on display next to 'RST'
Charger - 90-240vac, 47-63Hz
Charger is UL, CE, TUV approved

Probe Wavelengths:

173nm, 193nm, 220nm, 248nm, 254nm, 260nm, 280nm, 310nm, 365nm, 400nm, 420nm, 436nm, 540nm, and more

Size:

5 3/4 L (146mm) x 8 1/4 (210mm) x 2 H (51mm) Weight

* Mode 2 and Mode 4 have an additional capability to measure five (5) points as well as nine (9) points. The pattern used for five points is #1 center, #2 straight up (12 o'clock), and #3 left of center (9 o'clock), and #4 straight down (6 o'clock) and #5 right of center (3 o'clock). When the fifth reading is taken then the word 'CALC' shows up on the display. Press the 'CALC' button and the 'More' button and the % deviation of each reading from reading #1 will be displayed. In reading nine points, ignore the 'CALC' selection.

Note #1: When the battery symbol comes on next to the 'RST' (reset) on the display, then plug in the charger to continue operating the Model 400. The time left on the battery is 30 minutes maximum.

Note #2: The circular counter clockwise pattern is #1 center with #2 position straight up at 12 o'clock with number rotation counter clockwise at 45 degree increments 3 through 9. The linear pattern is #1 center position, #2 upper left, #3 upper center, #4 upper right, #5 left center, center, #6 right center, #7 lower left, #8 lower center and #9 lower right.

Note #3: Uniformity is calculated using the following formula:

Max reading - Min reading

Max reading + Min reading

x 100 = +/-%

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